SCT-2550
SCT offers a low-cost version of the popular VES-2550 evaporation system
which was originally introduced by Temescal. The SCT-5000 incorporates the
best available components, including Telemark e-beam components.
Manual Load Batch System
Vacuum System Performance
The SCT-2550 pumps down from atmosphere into the 10-7
range in 10 minutes, to 5x10-7 torr in 30 minutes. The VES
operates in the 10-6 range with, for example, a half an hour
cycle time for 10,000 Å of Al. A 10" CTI Cryogenics pump is mounted
off a poppet valve and backed by a 53 cfm floor mounted mechanical pump (to
eliminate vibration.) Manual load batch system.
Under the Chamber Lid
The water cooled, stainless steel, bell jar shaped lid is 25.5" dia. by
12" high. Under this spring assisted, finger touch lid is your choice of
deposition fixtures, e.g., TP-8 angle of incidence domed rotary substrate
carrier. High capacities of 162: 2", 75: 3", or 42: 4" wafers per run at
30 minutes. Custom fixturing is available.
Electron Beam Source
Three electron beam sources can be mounted on the source tray for
multimaterial simultaneous or sequential evaporation. The
e-beam guns incorporate 270° beam deflection to increase filament life,
permanent primary magnets to maintain the e-beam on the source, and built
in lateral and longitudinal deflection coils to sweep the e-beam. An ion
source can easily be installed for ion milling and etch.
Source Tray
Easy Access to the source tray (27.5" dia.) is obtained by means of an
hydraulic hoist. When lowered the tray swings outward 90°.
Automatic Valve Sequencer
Automatic system pump down is achieved at the push of a button. Key
locked and manual modes makes switching between maintenance or production
operation easy. Industrial PLC process
control is optional. The operator then loads the substrates, pushes the
start button, and allows the system to run any selected process
automatically.
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