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> NEW! Replicated Systems
   SCT-5000  (CHA Mark-50)
   SCT-600  (CHA 600)
   SCT-1000  (CHA 1000)
   SCT-2550  (VES-2550)
   SCT-1800  (BJD, FC & MRC Series)
   SCT Axis Series

> Remanufactured Systems

> Fixtures & Components

System Control Technology (SCT) designs, develops, manufactures and markets thin film deposition systems, both sputtering and evaporation as OEM and re-manufactured as well as vacuum system components to worldwide market.

SCT products are grouped into three categories:

1. SPUTTERING SYSTEMS
2. EVAPORATION SYSTEMS
3. VACUUM COMPONENTS

Sputtering Systems
All SCT systems offer a broad range of coating applications and a variety of features such as DC and RF sputtering cathodes, RF etching, RF and/or DC bias, ion beam milling and substrate heating. Many years of experience have contributed to developing and supporting this product line in a wide variety of research and development and production applications; including flat-panel display devices, magnetic disk media, optical data-storage disks, solar cells, LCD’s, silicon wafers, compound semiconductor, thin-film computer heads, hybrid devices, optical coatings and other general tin-film Principal products in this category are:

Arrow Sputter Up or Down and Axis Inline Side Sputter System
Can utilize up to four (4) planar magnetron DC and/or RF cathodes deposition onto a fourteen (14) inch flat plate. The Arrow is available in a sputter up or down configuration and has an optional cryo pumped load-lock while the Axis processes substrates in a vertical position, either single (1) or double (2) sided.

EVAPORATION SYSTEMS.
SCT’s versatile evaporation systems can be used in almost every type of evaporation application. Each system can include a combination of single and/or multi crucible electron beam guns, thermal evaporation sources, glow-discharge cleaning, ion-beam milling and substrate heating. Standard substrate fixturing depends on the specific application. Lift-off domes, high-speed planetary systems and optical fixturing are available. Each system can be equipped with diffusion, cryogenic or turbo-molecular pumping systems. Applications for these systems include silicon wafers, compound semiconductor, electro-optical devices, hybrids, microwave devices, optical memory discs, and general optical and coating processes. In addition to the standard systems noted below, SCT builds custom systems to meet specific customer requirements.

Vector Load-Lock Evaporator
The SCT Class 10 compatible Vector, provides field-proven vacuum components, fixturing and electronics in a completely new system design. Yields are enhanced by such features as the automated fast cycle load-lock design, high speed water vapor pumping and dry pumping of the system, dedicated quartz crystal control for monitoring each evaporation material and integrated residual gas analyzers for system diagnostics. Particulates are minimized by separate cryogenic pumps for the source chamber and load-lock, soft rough and vent, friction free substrate fixture and the through-the-wall installation allowing all maintenance to be conducted outside of the clean room. Process flexibility is provided by the General Electric Fanuc PLC control. Up to two multi-crucible electron beam sources, power supplies and optional substrate fixturing and accessories can be provided.

Orion Box Chamber Evaporator
The SCT Orion is available with up to a 36” x 36” box chamber. Each system can incorporate up to three (3) electron beam sources and multiple thermal sources. The system can include such options as 3 kW, 5 kW, 10 kW or 15 kW electron beam power supplies, 2 kW, 3 kW, 4 kW or 6 kW thermal power supplies, quartz crystal deposition controllers, substrate heating, optical monitoring systems, glow discharge cleaning and ion cleaning sources. The systems can be pumped by diffusion pumps, cryogenic pumps or turbo-molecular pumps and the box chamber version can be mounted through a clean room wall. Process flexibility is provided by a touch screen display PLC.

VACUUM COMPONENTS
SCT supports a wide range of vacuum instrumentation and components and has a 20 year history of reliable, on time delivery. Principal products in this category are: INSTALLED OEM BASE SUPPORT

MRC 600/900 series system including shields, cathodes, consumables, sub-assemblies and electronics.
 
Perkin-Elmer 2400/4400 series system including shields, cathodes, consumables, sub-assemblies and electronics.
 
CHA 600/1000/Mark-50 series system including shields, cathodes, consumables, sub-assemblies and electronics.
 
Temescal BJD/FC/VES/PCS-5 series system including shields, consumables, sub-assemblies and electronics.
 
Innotec ES/VS series system including shields, consumables, sub-assemblies and electronics.