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The Vector is a load lock box type evaporator completely enclosed in an electropolished stainless steel cabinet. The system is designed for easy integration into a clean room and allows easy access to all controls.

The Vector has been designed with flexibility in mind, and can accommodate a large variety of vapor deposition equipment deployed in custom configurations. The evaporation source chamber is maintained under high vacuum at all times. By doing this, we reduce substrate contamination during evaporation, and achieve higher evaporation rates as a result of vacuum degas of source material, resulting in a superior product.

Programmable High Vacuum System Controller with Data Logging Capabilities
SCT provides as a standard a GE Fanuc PLC industrial controller. This system includes ladder logic software with required programming for the SCT Vector. The operator/engineer computer interface includes a GE Fanuc Display Station 2000 (GE 15" touch screen computer); GE "Cimplicity" HMI, or equivalent and all required software programming are also provided. The control system also performs data logging of all key process variables.

Deposition Sources
The electron beam gun is a new six-pocket (100cc) Telemark design. The source is designed to handle the kilowatt requirements to bridge the 48" source to substrate distance necessary to perform 90˚ liftoff (±3˚) on 6" wafers. The unique magnetic design of the gun prevents the beam from curling within the pocket as material is depleted during the deposition process, thereby preserving the same beam position at all times.

Substrate Fixture
A rotating dome designed to offer a fixed spherical radius to the deposition source is supplied with this system. It is a standard lift-off fixture that presents the substrates to the deposition stream at a precise 90˚ angle, ensuring proper deposition geometry. The liftoff fixture is driven by a crank arm engaging the center of the come, offset on precision ball bearings. This crank arm is attached to a feedthrough at the top of the chamber which, in turn, is connected to a DC motor controlled by the vacuum system controller. The dome is adjustable in height by adjusting its drive shaft and the bearing mounting fixture. The dome has a capacity of twenty-five (25) 6" diameter wafers. Domes designed to carry other substrate sizes are also available. Blank disks with wafer clips can be supplied for broken or irregular shaped wafers.

Custom Features
All of SCT's systems are built to customer specifications, making each system unique. Our engineering department can make any modifications requested by the client to the basic design so that we can provide a fully documented custom system, tailored to your specific requirements.

Model ES-26C Specifications

Chamber Construction
All internal surfaces are electropolished 304 stainless steel.

Frame and Cabinet
Welded steel tube frame; adjustable feet; formed steel panels; enamel finish.

Electron Beam Source
The electron beam source is a new six-pocket, 100cc, Telemark design. Source tray mounted and fully shielded.

Substrate Fixturing
90˚ angle of incidence liftoff dome designed to hold 25 six inch wafers.

Quartz Crystal Deposition Controller
Multi-layer, multi-process control with nine individual film programs and total capacity of up to 180 layers. It can support up to three single head or dual head sensors or one six sensor turret head.

Power Supplies
15kW.

System/Gauge/Valve Controller
GE Fanuc PLC with data logging capabilities.

High Vacuum Pump
Helix CTI-10 on-board cryo pump for the substrate chamber; Helix CTI-400 on-board for the source chamber.

Roughing Pump
The standard pump is an Edwards 180 cfm dual stage mechanical pump. An Ebara "A", rated at 105 cfm and a base pressure of 30 mtorr is offered as an option

High Vacuum Pump Isolation Valve
The source chamber uses a VAT 16" gate valve, and the substrate chamber uses a VAT 10" gate valve..

Roughing Valve
Stainless steel electropneumatically actuated high vacuum bellows sealed right angle valve.

Vent Valve
Stainless steel right angle valve,  electropneumatically actuated.

Viewing Ports
Two 4” view ports with manual shutters to minimize coating of the viewing surface. Located in upper and lower chamber.

Overall Dimensions
72" high x 72" wide x 30" deep.

Air
Normal, dry lubricated shop air at 70-125 PSIG

Power
208 VAC, 3 phase, five wire, 60 Hz, 60 Amps. A separate supply is required for each electron beam power supply. Other voltages also available.

Water
Approximately 18 gpm at 40 psi with a maximum temperature of 70˚F.

Gaseous Nitrogen
60 psig.

Custom Configurations Available