CHA Fixturing

Spherical domed planetary substrate holder

The substrate holder revolves while it also rides around a center giving an epicycle motion to each substrate. This fixturing is domed presenting a large surface area for substrates to accommodate more parts for the same chamber diameter. Coating is uniform across the three domes considering the directional properties of emission of the virtual source.

CHA planetary fixturing

Rotating dome substrate holder

A rotating dome enables efficient use of the available coating area. The dome rotates about a vertical axis at the calculated distance from the virtual source.

Rotating dome

Components

MRC Parts

magnetic

Part No.	Description	Price
828-39-000	Upsilon	$29,950
828-45-000	Mu	$21,450
828-36-000	Chi	$20,400

Part No.	Description	Price
828-05-000	Magnetron	$14,050
828-04-000	Diode	$9,750

Chi Mu Upsilon Conversions

Part No.	Description	Price
899-99-583	Upsilon,Mu to Chi	$7,350
899-99-584	Chi,Mu to Upsilon	$13,600
828-46-000	Chi,Upsilon to Mu	$5,800
899-98-086	Chi,Upsilon to 1pc.Mu	$5,550

MRC INSET Target

High uniformity

For Aluminum, MRC guarantees ±5% film uniformity across a pallet of substrates and ±5% batch-to-batch. Production users of INSET targets report uniformities of ±3% within a single batch of substrates and from batch-to-batch.

High Deposition Rates

Electron capture shields surrounding the INSET cathode permit higher deposition rates with less heating of the substrates. The 903 takes advantage of this high deposition rate to achieve its high thruput.

High Utilization

Chi, Mu, Upsilon INSET targets achieve a material utilization of more than 50% and are available for most metallization applications.

Ease of Installation

The INSET targets can be changed by simply removing a series of clamping bolts. Most importantly, the targets require no backing plates or rebonding. As a result, INSET targets are the easiest, least expensive targets in the industry to install.

Categories of parts on hand

Bellows
Cassette Memory Tape Units
Chem-Clean Service
Cylinders
DC Power Supplies
Drive Components
Ferrofluidic Feedthrough
Fuses and Circuit Breakers
Gauge Tubes
Heat Lamps
Insulators
O-Ring Kits
OEM Computer and Analog Rack
Pallets
Rebuilt CTI Cryogenic Pumps and Compressors
Rebuilt Mechanical Pumps
RF Tuning Networks, Capacitors, Inductors, Rectifiers, Tubes, and Generators
Shielding Sets
Switches
Valves
View Ports
Automation in Vacuum Deposition

PLC Screen for Vacuum Deposition

recipe
SCT integrates GE Fanuc's Cimplicity HMI package, running on a Windows NT platform, as the operator interface software.ÊGE Fanuc'sÊ90-30 PLC series is SCT's controller of choice andÊprovides the control engine for optimum automation and flexibility. The total package makes your system a highly reliable and industrial hardened tool that truly performs. Computer hardware is Intel Pentium based for fast data processing with off the shelf availability. Each system is linked by modem to our factory for instant system diagnosis and software upgrades. Networking with mainframes or other systems is now available.

All systems feature:

Individual screens with configuration utility
Process recipe program
Comprehensive report generation
Automatic cryopump regeneration
Vacuum map
Online help screens
Multi level security protection

Options may include:

Integrated RGA on the chamber
Comprehensive report generation
Six Sigma Statistical Analysis

See a sample recipe screen.