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The SCT Drum Coater is a standard vacuum system that may be used in a wide variety of sputtering applications. The system is a member of a new family of batch-type coaters that have been designed to take advanage of the unique characteristics of cryo pumping. The pump is side mounted with high conductance valving and a variable orifice plate coupled in an extremely compact manner. An example of this drum coater is the SS-24, which is described below.

The Chamber
The chamber is constructed of 304 Stainless Steel, 24" in diameter and 19" high. Sources are side mounted on Viton O-ring sealed flanges. Chamber sides are faceted allowing easy addition of feedthroughs as desired. A 4" viewport is installed in the front of the chamber. The system bottom plate is easily removable, Viton O-ring sealed and is entirely useable for mounting tooling and accessories. The top plate is Viton O-ring sealed and is supported by a hydraulic hoist allowing ample vertical travel. The vertical axis drum substrate tooling is mounted from the top plate. Substrate carriers are easily removed from the drum for substrate load and unload.

The chamber is supported by a welded steel tube frame at a height that allows ease of operation and service. The pumping stack and all valving is enclosed but readily accessible for maintenance. A dual 19" instrument rack allows the positioning of all controls for convenient operation.

Valves and Gauging
All valves are electropneumatically actuated and all actuators are bellows sealed. Viton O-rings are used for all static seals. A complete set of gauging ports and sensors are provided. Rough vacuum is sensed by two thermocouple gauges and high vacuum is measured using Bayard-Alpert gauges mounted in the chamber and the cryo pump. A metal sealed port is provided for the addition of the RGA of your choice.

Programmable Vacuum System Controller with Data Logging Capabilities
SCT provides a standard PLC industrial controller. This system includes ladder logic software with any custom programming for the SCT sputter system. The operator/engineer computer interface includes a touch screen display, HMI, and all required software programming. The control system also performs data logging of all key process variables.

Wiring
All system wiring and workmanship conforms to OSHA and SEMI standards. Power wiring is conservative, fully interlocked and easy to service or modify. Actuator signal wiring is 24 volt or lower and all control logic uses industrial grade 12 volt signal levels of an exceptional degree of noise immunity.

Special Systems
SCT can add your choice of substrate carriers, spindle fixtures, sputter sources, power supplies and custom electronics. The SS-24 provides the standard base upon which to build a sputtering system capable of outstanding performance.

Specifications - SS-24

Chamber Construction - Electropolished stainless steel; side pumped; 23" inside diameter; 26" outside diameter; 19" high; with .70" thick top and bottom flanges; 4" viewport; 2-3/4" metal sealed flange RGA port; 1" diameter feed through holes as quoted.

Top and bottom Plate - Electropolished stainless steel .70" thick; Viton O-ring sealed; source, tooling and feedthrough holes as quoted.

Frame and Cabinetry - Welded steel tube frame; adjustable feet; formed steel panels; hinged front and rear door; side panels hung with magnetic retainers, baked, textured enamel finish.

Hoist - Heavy duty; motor-driven control; fully interlocked; fail safe on power loss.

System/Gauge/Valve Controller - PLC with data logging capabilities

High Vacuum Pump - 8" cryo pump for clean, high speed pumping. Pumping speed; 5,000 L/S water; 1,500 L/S air. Turbomolecular pumps optional

Roughing Pump - A gas ballasted compound pump rated at 26 CFM and having a base pressure of 0.1 micron serves as the roughing and regeneration pump. The mechanical pump is a direct drive type and is connected to the roughing manifold through a 1-1/2" diameter flexible stainless steel vacuum line. It is arranged for remote location.

High Vacuum Valve - Stainless steel gate valve with 7-3/4" clear aperture; electropneumatically actuated, Viton O-ring sealed gate; bellows sealed actuator arm.

Roughing Valve - Stainless steel right angle valve; 1-1/2" diameter; electropneumatically actuated, Viton O-ring sealed bonnet; bellows sealed stem.

Cryo Pump Rough Valve - Stainless steel right angle valve; 3/4" diameter; electropneumatically actuated, Viton O-ring sealed bonnet; bellows sealed stem.

Vent Valve - Stainless steel valve; 3/8" diameter; electropneumatically actuated.

Roughing trap - stainless steel body with replaceable sieve material.

Dimensions (overall) - 73" high x 74" wide x 32" deep

Air - 80 PSIG min.: 1/4" NPT

Power - 208 VAC, 3 phase, 50/60 Hz, 60 Amp service; master breaker; individual pump and accessory breakers; tapped primary 115 V, 10 Amp isolation/stepdown transformer for instrument power; convenience 115 V outlet strip. Other voltages also available.

Custom Configuration Available up to 60" Diameter.

Standard Substrate Fixturing - Vertical Axis Drum with RF Bias/Etch Capability - 304 stainless steelcarriers. Easily removable for substrate loading. Adaptable for substrates up to 4". Variable speed control and optional programmable single pass mode.