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   SCT-5000  (CHA Mark-50)
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   SCT-1000  (CHA 1000)
   SCT-2550  (VES-2550)
   SCT-1800  (BJD, FC & MRC Series)
   SCT Axis Series

> Remanufactured Systems

> Fixtures & Components

Systems Built for Today and Beyond

SCT has accumulated extensive experience in cost-effectively rebuilding and automating thin-film equipment. SCT has shipped over 280 PVD, CVD and etch system built since the 1970s. Chances are if you have it, or want it, SCT has done it.

Major companies and start-ups in the semiconductor, hard disk drive, optical coatings, sensors and MEMS industries depend on SCT. Since our founding, customers have included such Fortune 500 companies as Intel, Motorola, Hewlett Packard, IBM, Ford, General Motors, Boeing and Texas Instruments, in addition to dozens of smaller companies with advanced micro-fabrication equipment needs.

We begin by acquiring a system either from our global network, well-stocked inventory, or you, our customer. Every subsystem and part is scrutinized in our factory to develop a detailed work requirement order. All vacuum and mechanical components are replaced or rebuilt to meet or exceed OEM specifications at the system level. All of the old analog instrumentation and controls are replaced with a single GE Fanuc industrial hardened PLC, operated by customized process control software and displayed through our intuitive graphical user interface. The entire system is subjected to a strenuous set of process operations to ensure robustness in a production environment. We install, help facilitate and burn in the system in the customer's clean room and offer operator training to help our Customers realize the benefits of the reengineered system.

Which System Is for You?

SCT offers systems which fall within three general categories: those which are refurbished to original OEM specifications at time of manufacture; those with upgraded control technologies; and SCT's own new systems. While systems at these three levels vary widely in capability and cost, all are remanufactured to the same exacting standards and carry a one year warranty - the longest in the business - and the best documentation and support anywhere.

LEVEL ONE: Rebuild to Original OEM Specifications
The purchase of a remanufactured deposition system or the refurbishing of a current one to original OEM specifications is an economical option for universities, start-ups, R&D operations, and generally for any institution with limited resources. Systems such as the CHA-1000 and the Temescal BJD-1800 do not require PLC upgrades, but for some represent perfectly workable solutions as they were at time of manufacture. Although this is our least sophisticated option, every system is completely torn down and rebuilt from the frame on up. We perform a rewire of the entire system, and replace every o-ring. Every part is inspected for vacuum integrity.

LEVEL TWO: Rebuild with Upgraded Process Controls
As a result of the technological advances in process controls, SCT can provide (and only charges for) the reliable open standard technology that our customers need:

• Industrial hardened GE fanuc PLC
• Intuitive GE CIMPLICITY HMI
• Data analysis (ODBC)/SPC
• Factory-remote diagnosis and software upgrades
• Latest Microsoft Windows operating system

Since 1978, SCT has custom-manufactured and rebuilt hundreds of high vacuum thin-film systems to meet the demanding performance, process control and cost requirements of our customers.

SCT offers a wide set of wafer processing equipment solutions tailored to individual requirements:

• Complete OEM mechanical rebuild
• PLC retrofit and mechanical rebuild
• Custom systems application engineering

LEVEL THREE: SCT's Very Own
Our venture into OEM territory is really evolutionary rather than a radical departure from the past. We began by selling refurbished equipment, with little in the way of upgrades. As new control technology became available, we incorporated it into our refurbishing process. When these older systems became scarcer, and parts were no longer readily available from the OEM, we began to make our own until finally we had acquired the ability to build an entire system ourselves, complete with the new control technologies which make our systems modern and up-to-date. Our new systems are not mere copies of older systems which are no longer being manufactured, but feature the most modern vacuum technology and controls. All are custom systems manufactured to individual customer specifications.

Systems such as the MRC-943 are no longer made by the manufacturer. For those customers whose application is suited ideally to the 943 and would like to add more systems, SCT can provide new ones with modern control technology and new parts for continued future support.

Our OEM systems are now targeted at users who do not need the high yields and accompanying high prices of the well-known name brands. For a fraction of the cost we will build a new fully customized system with our customer in mind - no more one size fits all!

Engineering and R&D

We continue in our efforts to stay at the cutting edge of technology by partnering with leading companies such as GE Fanuc Automation. WE offer consulting, software development and system integration for GE Fanuc PLC, SCADA and Motion Control product lines. We specialize in automation of semiconductor related processing equipment and are eager to assist you with any automation challenge.

Parts

SCT inventories a wide and constantly expanding selection of OEM wafer processing equipment consumables including but not limited to:
• INSET cathode assemblies
• Planar cathode assemblies
• Cathode replacement parts
• Copper backing plates
• RF generators (1.5 kw and 3 kw)
• MRC PC boards (900 and 600 series)
• Hydraulic blocks
• O-rings
• Stainless steel bellows
• RF transmission lines
• Bearings
• Switches
• Stainless steel shielding
• Super switches

Many of these parts come from the OEM and in many cases are of our own manufacture, principally parts that are no longer available through the OEM. We maintain parts and instrumentation for Airco-Temescal, CHA, MRC and Varian sputtering and evaporation systems. Most parts are in stock and all are reasonably priced.

Contact Information

Corporate Headquarters: 

System Control Technologies
3390 Viso Court
Santa Clara, CA 95054
Tel: (408) 988-0400
Fax: (408) 988-0903
email: sales@systemcontrol
technologies.com
 

International Office:

System Control Technologies
William Read
Director of International Sales
The Stables
Prospect Gardens
Elm Road, Evesham
Worcestershire WR11 3PX
United Kingdom
(44) 1386-423419 phone
(44) 1386-423171 fax
e-mail: William20read@aol.com