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Vertical - VS Series
SCT offers
Vertical (VS Series) and Horizontal (SS Series) sputter systems with
chamber diameters from 12 inches to 45 inches. These tools are suitable
for research and development as well as high-rate production. One example
of these range of systems is the VS-27C
vertical, batch-type sputter system which is designed for maximum flexibility.
It meets the challenges of almost every sputtering deposition process.
Whether your applications is research and development or
production, the VS-27C will optimize your sputtering requirements - for
silicon wafers, gallium arsenide, thin-film computer heads, hybrid
devices, optical memory discs.
This versatility results from the wide combination of
features available in the VS-27C.
The VS-27C is offered in sputter up, sputter down or side
sputter designs with a side mounted cryo-pump. It features high
conductance valving and close-coupled, variable orifice plates. Pumpstack
options include liquid nitrogen or water vapor pump baffles.
Standard substrate fixturing is a 24-inch flat plate
planetary. Both six and twelve planet versions provide superior step
coverage and thickness uniformities of ±3 percent. Other optional
substrate fixtures are available for your specific needs.
Up to six planer magnetron DC and/or RF sputtering cathodes
can be used in the VS-27C, and any combination of RF etching, RF and/or DC
bias, ion beam milling and substrate heating. An optional substrate
loadlock is also available.
Extensive shielding prevents cross contamination, minimizes
particulates and extends operating life.
THE CHAMBER
The chamber is constructed of 304 stainless steel, 27" in
inside diameter and 12" high. A 4" viewport is installed in the front of
the chamber. The system bottom plate is entirely useable for mounting
sources or tooling. The top plate is Viton O-ring sealed and is supported
by an electrical hoist allowing ample vertical travel. The top plate is
open for sources or tooling except for the few square inches required for
hoist attachment.
The chamber is supported by a welded steel tube frame at a
height which allows ease of operation and service. The pumping stack and
all valving is enclosed but readily accessible for maintenance. A dual 19"
instrument rack (single bay optional) allows the positioning of all
controls for convenient operation.
VALVES
All valves are electropneumatically actuated and all
actuators are bellows sealed. Viton O-rings are used for all static seals.
A complete set of gauging ports and sensors are provided. Rough vacuum is
sensed by two thermocouple gauges and high vacuum is measured using
Bayard-Alpert gauges mounted in the chamber and the cryopump. A metal
sealed port is provided for the addition of the RGA of your choice.
Programmable Vacuum System Controller with Data Logging Capabilities
SCT provides a standard a PLC industrial controller. This
system includes ladder logic software with any programming for the SCT sputter system. The
custom operator/engineer computer interface includes a touch screen
display, HMI, and all required software programming. The control system also performs data logging of all key process
variables.
WIRING
All system wiring and workmanship conforms to OSHA and SEMI standards.
Power wiring is engineered with safety in mind, is fully interlocked and
easy to service or modify.
Actuator signal wiring is 24 volts or lower and all control
logic uses industrial grade 12 volt signal levels with an exceptional
degree of noise immunity.
SPECIAL SYSTEMS
SCT engineers can add your choice of substrate carriers, sputter sources,
power supplies and custom electronics. The VS-27C provides the standard
base upon which to build a custom sputtering system capable of addressing
your unique requirements.
SPECIFICATIONS
Chamber Construction - Electropolished stainless steel; side
pumped; round; .70" flanges top and bottom; 27" inside diameter; 30"
outside diameter; 12" high; 4" viewport; 2.75" Conflat flange RGA port; 1"
diameter feedthrough holes as quoted.
Top and Bottom
Plate - Electropolished stainless steel .70" thick; Viton O-ring
sealed; source, tooling and feedthrough holes as quoted.
Frame and Cabinetry
- Welded steel tube frame; adjustable feet; formed steel panels; hinged
front and rear doors; side panels hung with magnetic retainers, baked,
textured enamel finish.
Hoist -
Heavy duty; electric control; fully interlocked; fail safe on power loss.
System/Gauge/Valve
Controller - PLC with data logging capabilities.
High Vacuum Pump
- Cryopump for clean, high speed pumping. Pumping speed: 4000 L/S water;
1500 L/S air. Turbomolecular pumps optional.
Roughing Pump
- 32.5 CFM
High Vacuum Valve
- Stainless steel gate valve with 8" clear aperture; electropneumatically
actuated, Viton O-ring sealed gate; bellows sealed actuator arm.
Roughing Valve
- Stainless steel right angle valve; 1.5" diameter; electropneumatically
actuated, Viton O-ring sealed bonnet; bellows sealed stem.
Foreline Valve
- Stainless steel right angle valve; .75" diameter; electropneumatically
actuated, Viton O-ring sealed bonnet; bellows sealed stem.
Vent Valve
- Stainless steel right angle valve; .25" diameter; electropneumatically
actuated.
Roughing Trap
- Stainless steel body with replaceable sieve material
Overall Dimensions
- 72" high x 72" wide x 30" deep
Air -
70-120 PSIG min.; 25" NPT
Power - 208 VAC, 3-phase, five wire, 60 Hz, 60 Amp service; master breaker;
individual pump and accessory breakers; tapped primary 115 V, 10 Amp
isolation/stepdown transformer for instrument power; convenience 115 V
outlet strip. Other voltages also available.
Custom
Configurations Available up to 60" Diameter.
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